Elsevier Science Home
Computer Physics Communications Program Library
Full text online from Science Direct
Programs in Physics & Physical Chemistry
CPC Home

[Licence| Download | New Version Template] aeqr_v1_0.tar.gz(175 Kbytes)
Manuscript Title: Langmuir probe RF plasma compensation using simulation method
Authors: A.A. Azooz, Y.A. Al-Jawaady, Z.T. Ali
Program title: RF Compensation
Catalogue identifier: AEQR_v1_0
Distribution format: tar.gz
Journal reference: Comput. Phys. Commun. 185(2014)350
Programming language: MATLAB 6.5 or higher.
Computer: Any laptop or desktop.
Operating system: Windows XP.
RAM: Bytes 512 K
Keywords: RF compensation, Langmuir Probe, Plasma parameters.
Classification: 19.3.

Nature of problem:
In RF plasma Langmuir probe diagnostics, the probe I-V characteristics obtained experimentally does nor represent the true I-V. This is because the probe picks up some RF plasma voltage which modulates the applied bias voltage and causes a current flow that corresponds the RF affected bias rather that the actual DC bias. This if untreated, can lead false results for the values of plasma parameters derived from the obtained I-V. Several hardware based methods are used to perform such correction (compensation).

Solution method:
The suggested method is based on filtration of raw uncompensated I-V data through software operation rather than hardware based filtrations which have their limitations.

Running time:
A few milliseconds.

[1] A.A. Azooz REVIEW OF SCIENTIFIC INSTRUMENTS 79 (2008) 103501