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Manuscript Title: Monte Carlo simulations of the transport of sputtered particles.
Authors: K. Macak, P. Macak, U. Helmersson
Program title: SPATS
Catalogue identifier: ADKN_v1_0
Distribution format: tar.gz
Journal reference: Comput. Phys. Commun. 120(1999)238
Programming language: C++.
Computer: IBM PC.
Operating system: Linux (RedHat v. 4.0), Solaris v. 5.6.
RAM: 1640K words
Word size: 32
Keywords: Plasma physics, Transport, Monte carlo, Magnetron sputtering, Deposition.
Classification: 19.11.

Nature of problem:
Simulation of the transport of neutral sputtered particles during magnetron sputter deposition. Sputtered particles, that have an initial energy of several eV, are scattered by collisions with inert gas atoms and their energy and direction is affected before arriving to a surface. This process is dependent on system geometry, pressure, etc. The program provides information about spatial distribution of the fluxes towards surfaces in the chamber, density of sputtered particles in the glow discharge, and angular and energy distribution of the flux arriving to a substrate surface. These are crucial parameters for understanding of the film growth process.

Solution method:
Monte Carlo simulation of the flight of neutral particle through an inert gas is used. The collisions are modelled by means of Lennard-Jones potential, Biersack's potential, or a binary hard sphere approximation with energy dependent collision cross section. Initial random velocity and direction of the sputtered particles are set according to the distributions predicted by the collisional cascade sputtering model [1] or by TRIM [2-4] simulation results.

The influence of the sputtering process on the gas such as heating and rarefaction is not taken into account.

Running time:
For 0.13 Pa (1 mTorr) argon gas pressure and 10**6 generated particles 8 minutes of CPU time is used on Sun Ultrasparc computer.

[1] P. Sigmund, Phys. Rev. (1969) 383-416.
[2] J.F. Zieglier (IBM Research, Yorktown, NY 10598, USA, 1997).
[3] J.P. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985).
[4] W. Moller, W. Eckstein, J.P. Biersack, Comput. Phys. Commun. 51 (1988) 355.